Dry Etching TechniquesExplores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Fabrication extended: EtchingCovers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.
Microfabrication TechnologiesExplores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Silicon Etching TechniquesExplores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.
