Lecture

Actuators and Optical MEMS

In course

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Description

This lecture covers the principles and applications of actuators and optical MEMS, including electrostatic comb drive actuators, magnetic actuators, and micromirrors. It discusses the design and operation of various actuation methods, such as electrostatic and magnetic actuation, and their advantages and limitations. The lecture also explores examples of advanced optical MEMS systems used in mobile and consumer electronics, such as microshutters and displays. Additionally, it delves into the concepts of reflective coatings, distributed Bragg reflectors, and high contrast gratings, highlighting their significance in MEMS technology.

Instructor

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Official source

https://mediaspace.epfl.ch/media/0_of7ucv1q

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