This lecture introduces Scanning Probe Microscopy (SPM) and its history, including the development of STM and AFM. It covers the principles of SPM, such as quantum tunneling and Van-der-Waals forces, and discusses the challenges in achieving high resolution. The use of feedback mechanisms in SPM, the comparison with other microscopy techniques, and the importance of tip-sample interactions are also explored. Applications in semiconductor research and industry are highlighted, emphasizing the significance of SPM in surface analysis and topography measurements.