Publication
Planar magnetic sensor, made in particular via CMOS techniques on a semiconductor substrate (1) of for example parallelepiped shape. It includes an amorphous ferromagnetic core (10) in the shape of a Greek cross which occupies the two diagonals of the square defined by the outer contour (90) of the excitation coil (9), the latter being made in the form of a planar winding of square shape. One thus measures, via flat detection coils (70, 80 and 71, 81) which are mounted in series and in a differential arrangement, the two orthogonal components (H1, H2) of the external magnetic field (Hext).
Jürgen Brugger, Giovanni Boero, Xiao Sheng Zhang, Ya Wang
Pedro Miguel Nunes Pereira de Almeida Reis, Matteo Pezzulla, Dong Yan
Diego Ghezzi, Mahmut Selman Sakar, Lorenzo Francesco John Noseda, Amit Yedidia Dolev, Adele Fanelli