We present the simulation, fabrication, and characterization of a metallic slot grating on a silicon waveguide (30nm slot width for a period of 500nm). According to the simulation, the experimental measured spectrum of the structure exhibits a dip in the near-infrared region. Moreover, the finite-difference time-domain simulation shows that this device can be used as a sensor, due to its high sensitivity to the refractive index variation of the medium above and inside the cavity (η ¼ Δλ=Δn ¼ 750nm=refractive index unit).
Ivo Furno, Alan Howling, Fabio Avino, Rita Agus, Brayden Graham Myers, Lorenzo Ibba, Leonardo Zampieri
Camille Sophie Brès, Anton Stroganov, Ozan Yakar, Christian André Clément Lafforgue, Marco Clementi, Anamika Nair Karunakaran