Biosensors often require detecting infinitesimal amount of species, thus their readout must be improved for highest sensitivity and best Signal-to-Noise ratio. We will present a simulation tool for piezoresistive strain sensors, which takes into account nonuniform current flow in e.g., a U-shaped piezoresistor, and calculates local resistivity changes based on the piezoresistive coefficients with corresponding directions. This simulation tool yields DR/R as a result. Thus a real piezoresistor layout, rather than a symbolic resistor, can be simulated. Important aspects of optimum piezoresistive readout for biosensors will be discussed.
David Atienza Alonso, Tomas Teijeiro Campo, Lara Orlandic, Jérôme Paul Rémy Thevenot
Aleksandra Radenovic, Georg Fantner, Vytautas Navikas, Barney Frederick Drake, Helena Miljkovic, Simon Finn Mayer, Sanjin Marion
Frédéric Courbin, Georges Meylan, Gianluca Castignani, Maurizio Martinelli, Slobodan Ilic, Yi Wang, Richard Massey, Marcello Farina