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We report on a 4-bit digital silicon photonic MEMS phase-shifter with sub-microsecond switching time and low power consumption (< 10 uW). The device consists of 4 digitally switched phase-shifting units, which in total enable phase shift from pi/8 to 15pi/8 in increments of pi/8.
Klaus Kern, Stephan Rauschenbach, Sven Alexander Szilagyi, Hannah Julia Ochner
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