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Publication
Are you an EPFL student looking for a semester project?
Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.
Kyojin Choo, Li Xu, Yimai Peng
Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano