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Publication
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Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
3D printing of MEMS devices could enable the cost-efficient production of custom-designed and complex 3D MEMS for prototyping and for low-volume applications. In this work, we present the first micro 3D-printed functional MEMS accelerometers using two-photon polymerization combined with the evaporation of metal strain gauge transducers. We measured the resonance frequency, the responsivity, and the signal stability over a period of 10 h of the 3D-printed accelerometer.
Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano
Kyojin Choo, Li Xu, Yimai Peng