In this paper we describe new ways to realise micro-channels. The used technologies are based on a novel thick-film photoplastic, the SU-8. This photoresist has outstanding properties, allowing the realisation of high aspect ratio microstructures. It is a simple and low-cost fabrication process. The micro channels developed in this work it will be used for the realisation of thermal flow-sensors.
Luis Guillermo Villanueva Torrijo, Annalisa De Pastina
Josephine Anna Eleanor Hughes, Kai Christian Junge, Antonia Georgopoulou Papadonikolaki