Applications of thin SixNy membranes may be found in miscellaneous fields such as MEMS and NEMS as well as biotechnology. FIB is an excellent tool in order to realize nano-structures on membranes achieving the ultimate limits and rapid prototyping.
Jean-François Molinari, Son-Jonathan Pham-Ba
Alessandro Mapelli, Radoslav Marchevski, Alina Kleimenova