Category
Microelectromechanical systems
Related people (718)
Jürgen Brugger
I am a Professor of Microengineering and co-affiliated to Materials Science. Before joining EPFL I was at the MESA Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. I received a Master in Physical-Electronics and a PhD degree from Neuchâtel University, Switzerland. Research in my laboratory focuses on various aspects of MEMS and Nanotechnology. My group contributes to the field at the fundamental level as well as in technological development, as demonstrated by the start-ups that spun off from the lab. In our research, key competences are in micro/nanofabrication, additive micro-manufacturing, new materials for MEMS, increasingly for wearable and biomedical applications. Together with my students and colleagues we published over 200 peer-refereed papers and I had the pleasure to supervise over 25 PhD students. Former students and postdocs have been successful in receiving awards and starting their own scientific careers. I am honoured for the appointment in 2016 as Fellow of the IEEE “For contributions to micro and nano manufacturing technology”. In 2017 my lab was awarded an ERC AdvG in the field of advanced micro-manufacturing.
Nico de Rooij
Nico de Rooij is Professor Emeritus of EPFL and previous Vice-President of CSEM SA. He was Professor of Microengineering at EPFL and Head of the Sensors, Actuators and Microsystems Laboratory (
SAMLAB
) from 2009 to 2016. At
CSEM SA
he was responsible for the EPFL CSEM coordination from 2012 to 2016. His research activities include the design, micro fabrication and application of miniaturized silicon based sensors, actuators, and microsystems. He authored and coauthored over 400 published
journal papers
in these areas.
He was Professor at the University of Neuchatel and Head of the Sensors, Actuators and Microsystems Laboratory (SAMLAB) from 1982 to 2008. Since October 1990 till October 1996 and again from October 2002 until June 2008, he has been the director of the Institute of Microtechnology of the University of Neuchatel (IMT UniNE). He lectured at the Swiss Federal Institute of Technology, Zurich (ETHZ), and since 1989, he has been a part-time professor at the Swiss Federal Institute of Technology, Lausanne (EPFL). He has been appointed Vice-President of the CSEM SA in February 2008 and headed the newly created Microsystems Technology Division of CSEM SA, from 2008 until 2012. He was Director of EPFL's Institute of Microengineering (EPFL STI IMT) from 2009 to 2012, following the transfer of IMT Uni-NE to EPFL.
Dr. de Rooij is a Fellow of the IEEE and Fellow of the Institute of Physics (UK). He recieved the IEEE
Jun-Ichi Nishizawa Gold Medal
, the Schlumberger Prize as well as the
MNE Fellow Award 2016
. He was awarded a Visiting Investigatorship Program (VIP) in MEMS/NEMS Systems by the
A*STAR Science and Engineering Council (SERC)
, Singapore, hosted by
SIMTech
, for the period 2005-2008.
Prof. de Rooij is Corresponding Member of the
Royal Netherlands Academy of Arts and Sciences
and Individual Member of the
Swiss Academy of Engineering Sciences
.
He has been serving on the Editorial Boards of the
IEEE/ASME Journal of Microelectromechanical Systems (IEEE JMEMS)
,
the IEEE proceedings
,
the Journal of Micromechanics and Microengineering, JM & M,
,
the Sensors and Actuators
,and
Sensors and Materials
. He was Member of the Information and Communication technology jury of the BBVA Foundation Frontiers of Knowledge Awards from 2009 to 2012.
Dr. de Rooij is (or was) Member of numerous international steering committees of conference series as well as
technical paper review panels including the steering committee of the International Conference on Solid-State
Sensors and Actuators and of Eurosensors. He acted as European Program Chairman of Transducers '87 and General Chairman of Transducers '89, Montreux, Switzerland.
He has supervised more than 70 Ph.D. students, who have successfully completed their
Ph.D. thesis.
He received his M.Sc. degree in physical chemistry from the State University of Utrecht, The Netherlands, in 1975, and a Ph.D. degree from Twente University of Technology, The Netherlands, in 1978. From 1978 to 1982, he worked at the Research and Development Department of Cordis Europa N.V., The Netherlands.
Hans Peter Herzig
Dr. Hans Peter Herzig is Professor at the Ecole Polytechnique Fédérale de Lausanne (EPFL) and Past President of the European Optical Society (EOS). His current research interests include refractive and diffractive micro-optics, nano-scale optics and optical MEMS.
Hans Peter Herzig received his diploma in physics from the Swiss Federal Institute of Technology in Zürich, Switzerland, in 1978. From 1978 to 1982 he was a scientist with the Optics Development Department of Kern in Aarau, Switzerland, working in lens design and optical testing. In 1983, he became a graduate research assistant with the Applied Optics Group at the Institute of Microtechnology of the University of Neuchâtel, Switzerland, working in the field of holographic optical elements. In 1987, he received his PhD degree in optics. From 1989 to 2001 he was head of the micro-optics research group in Neuchâtel. From 2002 to 2008 he was a full professor and head of the Applied Optics Laboratory at the University of Neuchâtel. Professor Herzig joined the faculty at EPFL in January 2009.
He is member of OSA, IEEE Photonics Society and Fellow of EOS. 2009-2010 he was President of the European Optical Society (EOS), 2001-2009 Vice-President of the Swiss Society of Optics and Microscopy and 2012-2014 Vice-President of ICO. Dr. Herzig is in the editorial board of different scientific journals (JM3, Optical Review, JEOS). He served as Conference Chairman for international conferences of EOS, IEE, IEEE/LEOS, OSA and SPIE; and as Guest Editor of three special issues of IEEE, OSA journals. He is editor of a well-known book on micro-optics (published in English and Chinese), author of 14 book chapters, over 150 peer reviewed articles and 300 conference proceedings.
Philippe Renaud
Philippe Renaud is Professor at the Microsystem Laboratory (LMIS4) at EPFL. He is also the scientific director of the EPFL Center of MicroNanoTechnology (CMI). His main research area is related to micronano technologies in biomedical applications (BioMEMS) with emphasis on cell-chips, nanofluidics and bioelectronics. Ph. Renaud is invloved in many scientifics papers in his research area. He received his diploma in physics from the University of Neuchâtel (1983) and his Ph.D. degree from the University of Lausanne (1988). He was postdoctoral fellow at University of California, Berkeley (1988-89) and then at the IBM Zürich Research Laboratory in Switzerland (1990-91). In 1992, he joined the Sensors and Actuators group of the Swiss Center for Electronics and Microtechnology (CSEM) at Neuchâtel, Switzerland. He was appointed assistant professor at EPFL in 1994 and full professor in 1997. In summer 1996, he was visiting professor at the Tohoku University, Japan. Ph. Renaud is active in several scientific committee (scientific journals, international conferences, scientific advisory boards of companies, PhD thesis committee). He is also co-founder of the Nanotech-Montreux conference. Ph. Renaud is committed to valorization of basic research through his involvement in several high-tech start-up companies.
Luis Guillermo Villanueva Torrijo
Guillermo Villanueva is a Tenure Track Assistant Professor at the Ecole Polytechnique Federale de Lausane (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US); and before a post-doc at EPFL-LMIS1. He received his M.Sc. in Physics in Zaragoza (Spain) and his PhD from the UAB in Barcelona (Spain).
Since the start of his PhD (2002), Prof. Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertise from the design and fabrication to the characterization and applicability. He has co-authored more than 75 papers in peer-reviewed journals (h-index of 24 WoK, 32 GoS) and more than 100 contributions to international conferences.
He is serving, or has served, on the program committees of IEEE-NEMS, IEEE-Sensors, MNE, IEEE-FCS and Transducers. He is editor of Microelectronic Engineering. He has co-organized MNE2014 and SNC2015; and he is currently co-organizing the short courses at Transducers 2019 and the 16th International Workshop on Nanomechanical Sensors (NMC2019).
Ambrogio Fasoli
Ambrogio FASOLI was born on November 10, 1964, in Milano, Italy. After a classical high school diploma (Maturità Classica) and graduation from the University of Milano, with the degree of Dottore in Fisica, he obtained his Phd at the Ecole Polytechnique Fédérale (EPFL) with a thesis on chaos in wave-particle interactions in plasmas, which was awarded the Best EPFL Thesis prize, in 1993. He then moved to the JET Joint Undertaking, the largest worlds fusion device, near Oxford, UK, to investigate Alfvén waves and burning plasma physics. In 1995-1996 he took a sabbatical leave, visiting several Universities and Research Institutes in Europe and in the USA, including three months at General Atomics in San Diego. In 1996-1997, during a second period at JET, he participated in the fusion power worlds record experiments in Deuterium-Tritium plasmas at JET. In 1997 he was nominated Assistant Professor in MIT Physics Department, where he led a basic plasma physics group and the international collaboration between MIT and JET. In 2001 Ambrogio FASOLI was nominated Assistant Professor of Physics at EPFL, Lausanne, Switzerland, and Professeur Boursier of the Swiss National Science Foundation. He became member of CRPP Directorate and took the leadership of CRPP basic plasma physics group and of the TCV tokamak, one of the major fusion experiments worldwide. At European level he was scientific coordinator for JET experiments, spokesperson for multi-machine experiments in the frame of International Tokamak Physics Activities, and Project Leader for a JET Enhancement project. In 2005 he became Associate Professor of Physics with tenure at EPFL, then member of EFDA Science and Technology Advisory Committee, and of the Steering Committee of the Association EURATOM-Swiss Confederation. From 2006 he was also Deputy Director, then from 2007 Executive Director of CRPP and from 2008 Full Professor of Physics at EPFL. For a number of years he was the Chair of the EPFL Physics Strategic Committee and a member of the Directorate of the EPFL School of Sciences. Since the summer of 2014 Professor FASOLI was the sole Director of CRPP. He now represents Switzerland in the EUROfusion General Assembly and Bureau, and in the Governing Board for Fusion for Energy. He is member of the EUROfusion DEMO project Board, of the Scientific Board of the Helmotz Virtual Institute on Advanced Microwave Diagnostics, of the European Delegation for the Cooperation between Euratom and the Government of India in Fusion Energy Research, of the European Consortium for the development of the ITER gyratron (EGYC), and participates to numerous international review panels. He chairs the FuseNet Academic Council, the International Advisory Panel for the Laboratory of Excellence Plas@Par in the Sorbonne Universities, the European Consortium for the construction of the ITER microwave Upper Launcher (ECHUL), and the Promotion Committee of the EPFL Faculty of Basic Sciences. He is one the three European representatives in the International Tokamak Physics Activities Coordinating Committee, advising ITER, and the Editor-in-Chief of the IAEA journal Nuclear Fusion. Since January 2019, Ambrogio Fasoli is the Chair of the General Assembly, i.e. the president of EUROfusion, the European Consortium for Development of Fusion Energy. Professor FASOLI is a Fellow of the American Physical Society and since 2001 a Visiting Professor at MIT Physics Department. He is the Director of the Swiss Plasma Center.
Christophe Ballif
Christophe Ballif is director of the Phototovoltaics and Thin Film Electronics Laboratoryb) (PV-Lab at the institute of microengineering (IMT) in Neuchâtel (part of the EPFL since 2009). The lab focus is on the science and technology of high efficiency heterojunction crystalline cells,so-called passivating contacts for solar cells, multi-junction solar cells include novel generation Perovskite on innovative optical high speed detector and on various macroelectronics application. It also deals with energy management with a focus on integration of solar electricity into the energy system. The PV-Lab has strongly contributed to technology transfer and industrialization of novel devices and full technology with numerous companies. Christophe Ballif graduated as a physicist from the EPFL in 1994, where he also obtained in 1998 his Phd degree working on novel PV materials. He accomplished his postdoctoral research at NREL (Golden, US) on compound semiconductor solar cells (CIGS and CdTe). He worked then at the Fraunhofer ISE (Ge) on crystalline silicon photovoltaics (monocrystalline and multi-crystalline) until 2003 and then at the EMPA in Thun (CH) before becoming full professor at the University of Neuchâtel IMT in 2004, taking over the chair of Prof. A. Shah. Since 2013, C.Ballif is also the director of the new CSEM PV-Center, also located in Neuchâtel. The CSEM PV-Center is focussing more on industrialisation and technology transfer in the field of solar energy, including solar electricity management and storage. At the core of the CSEM PV-center activities lies several "pilot lines" for various kinds of solar cells manufacturing, with a focus coating technologies, wet chemistry processes for crystalline silicon, metalisation techniques for solar cells, and a platform for developing "ideal packaging solutions and polymers" for PV modules. In addition, joined facitilites between CSEM and EPFL of over 800 m2 are available for modules manufacturing, measuring and accelerated aging. CSEM PV-center has also full team dedicated to storage and energy systems and operates a joined center with BFH in Biel for research on electrochemical storage. He (co-) authored over 500 journal and technical papers, as well as several patents. He is an elected member of the SATW, member of the scientific council of the Swiss AEE, and member of the board of the EPFL Energy center. In 2016, he recieved the Becquerel prize for his contributions to the field of high efficiency photovoltaics.
Hatice Altug
2020-current Full Professor at the Institute of Bioengineering, EPFL, Switzerland2013-2020 Associate Professor (with tenure) at the Institute of Bioengineering, EPFL, Switzerland 2013 Associate Professor (with tenure) at Electrical and Computer Engineering Department of Boston University, USA 2007-2013 Assistant Professor (tenure-track) at Electrical and Computer Engineering Department of Boston University, USA 2007 Post-doctoral Fellow at Center for Engineering in Medicine of Harvard Medical School, USA 2000-2007 PhD. in Applied Physics at Stanford University, USA 1996-2000 B.S. in Physics at Bilkent University, Turkey
Martinus Gijs
Martin A.M. Gijs received his degree in physics in 1981 from the Katholieke Universiteit Leuven, Belgium and his Ph.D. degree in physics at the same university in 1986. He joined the Philips Research Laboratories in Eindhoven, The Netherlands, in 1987. Subsequently, he has worked there on micro-and nano-fabrication processes of high critical temperature superconducting Josephson and tunnel junctions, the microfabrication of microstructures in magnetic multilayers showing the giant magnetoresistance effect, the design and realisation of miniaturised motors for hard disk applications and the design and realisation of planar transformers for miniaturised power applications. He joined EPFL in 1997. His present interests are in developing technologies for novel magnetic devices, new microfabrication technologies for microsystems fabrication in general and the development and use of microsystems technologies for microfluidic and biomedical applications in particular.