Microelectromechanical systems

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Microelectromechanical systems

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A Reconfigurable Inductor Based on Vanadium Dioxide Insulator-to-Metal Transition

Photoinitiator-free Laser Fabrication of Ultra-compact, Low-loss Waveguides in Polydimethylsiloxane

Limitations of Proximity Lithography Printing

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Unified rule based correction for corners in proximity lithography mask using high resolution features

Control of the interaction strength of photonic molecules by nanometer precise 3D fabrication

Novel manufacturing methods for optical antennas

Superplastic behavior of silica nanowires obtained by direct patterning of silsesquioxane-based precursors

A reproducible method for μm precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner

Release area confinement in Contour Mode Resonators