Category
Microelectromechanical systems
Related publications (669)
Study of Linear Coupling in NEMS
Cantilever beams are used as mass sensing device of chemical analyte by measuring the shift in frequency. However there resolution is linked to their size. As it become increasingly hard to produce smaller device an alternative is to use mode localisation ...
2021Spontaneous formation of ordered micro-wrinkles on a thermosensitive resist
Jürgen Brugger, Giovanni Boero, Xia Liu, Ana Conde Rubio, Mohammadreza Rostami
Self-organizing patterns with micrometer-scale features are promising for applications in photonics and bioengineering. Their spontaneous formation reduces the number of required processing steps. Here, we report an approach to spontaneously form stochasti ...
2021PDC microfabrication through KOH-etched Si mould casting
The purpose of this project is to fabricate a mould etched by KOH for PDC casting and produce the fist PDC using this method. Casting for PDC is a known process, it has been done with PDMS moulds created from Si masters. Si moulds have also been fabricated ...
2021Fabrication of plasmonic structures with well-controlled nanometric features: a comparison between lift-off and ion beam etching
Olivier Martin, Christian Santschi, Banafsheh Abasahl
After providing a detailed overview of nanofabrication techniques for plasmonics, we discuss in detail two different approaches for the fabrication of metallic nanostructures based on e-beam lithography. The first approach relies on a negative e-beam resis ...
IOP PUBLISHING LTD2021Smart Slit Assembly Employing Continuously Tunable MEMS Shutter
Niels Quack, Hamed Sattari, Gergely Huszka, Anton Lagosh, Benedikt Guldimann
We present the concept and detailed design of a Smart Slit Assembly for next generation spectrometers, and we experimentally demonstrate operation of an individual 221 mu m x 111 mu m smart slit channel employing a MEMS actuated shutter to continuously mod ...
SPIE-INT SOC OPTICAL ENGINEERING2021Mesoscopic magnetic systems: From fundamental properties to devices
Research into mesoscopic magnetic systems, which incorporate magnetic elements with dimensions ranging from a few nm up to a few 10s of micrometer, has been spurred on by the developments in their fabrication, characterisation, and control. Electron beam a ...
2021FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE k(t)(2) APPLICATIONS
Luis Guillermo Villanueva Torrijo, Seniz Esra Küçük, Soumya Yandrapalli, Victor Plessky
This work presents the fabrication and analysis of suspended thin film Lithium Niobate resonators. The yield of the new fabrication process presented below is >90% showing devices with high k(t)(2) of 28% resonators at 5GHz, making them suitable for high f ...
IEEE2021Systematic design of millisecond gasification reactor for the incorporation of gas-sieving nanopores in single-layer graphene
Kumar Varoon Agrawal, Kuang-Jung Hsu, Luis Francisco Villalobos Vazquez de la Parra, Shiqi Huang, Shaoxian Li
Etching an ensemble of vacancy defects (nanopores) in single-layer graphene (SLG) to obtain a high density of nanopores with an effective size that enables high-performance gas sieving is challenging. This is because nanopore nucleation and expansion are u ...
2021Fabrication of glass suspended microchannel resonators
The goal of this project was to study if the fabrication of glass suspended microchannel resonators was possible. Through trial and error, the process parameters were determined, starting from the ideal dose in the dry etching process. The ideal size was d ...
2021Fabrication of new generation particle detectors
This project presents a microfabrication method for new generation particle detectors. This microsystem is supposed to detect ionizing radiation such as alpha particles, beta particles, and gamma rays. This project aims to miniaturized the otherwise well k ...
2021