Concept

Microelectronics

Related publications (28)

Reliable MEMS Actuators for Driving Large Microsystems

Nowadays many consumer electronic devices are using small engines (micromotors). Thanks to technological innovation, the components can be imbedded into numerous portable systems. The key factors for a nomadic integration are: reduction of power consumptio ...

EPFL2010

Correlation of microstructural and mechanical properties in particle reinforced lead-free solders

Venkatesh Sivasubramaniam

Solders are widely used as interconnect material for the electronic industry. The solder interconnect provides both electrical contact and mechanical connection between the integrated circuit devices and their substrate. Thus solders with good reliability ...

EPFL2009

MOS current-mode logic standard cells for high-speed low-noise applications

Stéphane Badel

With the continuous shrinking of devices dimensions in microelectronic circuits, it is becoming extremely desirable to integrate analog circuitry together with complex digital logic blocks. The noise generated by the digital parts in a mixed-signal integra ...

EPFL2008

Performance of an Integrated Microoptical System for Fluorescence Detection in Microfluidic Systems

Nico de Rooij, Hans Peter Herzig, René Dändliker

This article presents a new integrated microfluidic/microoptic device designed for basic biochemical analysis. The microfluidic network is Wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar microflu ...

2002

A microchip electrophresis system with integrated in-plane electrodes for contactless conductivity detection

Nico de Rooij

We present a new approach for contactless conductivity detection for microchip-based capillary electrophoresis (CE). The detector integrates easily with well-known microfabrication techniques for glass-based microfluidic devices. Platinum electrodes are st ...

2002

Fabrication of multilayer systems combining microfluidic and micro-optical elements for fluorescence detection

Nico de Rooij, Hans Peter Herzig, René Dändliker

This paper presents the fabrication of a microchemical chip for the detection of fluorescence species in microfluidics. The microfluidic network is wet-etched in a Borofloat 33 (Pyrex) glass wafer and sealed by means of a second wafer. Unlike other similar ...

2001

New photoplastic fabrication techniques and devices based on high aspect ratio photoresist

Grégoire Genolet

This thesis deals with the development of microfabrication technologies based on photoplastic structuring by lithographic and molding techniques. These technologies, combined with an original releasing method, allow for the simple fabrication of pseudo thr ...

EPFL2001

High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications

Philippe Renaud

Planar micromachined spiral inductive structures have applications in many areas such as microelectronics components (filters, low-power components, etc), or such as sensors (proximity sensors) and actuators (electromagnetic micromotors, micropumps, micror ...

1998

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