Related publications (28)

Load cell with positive, negative and zero stiffness operating modes for milli- to nanonewton contact force monitoring in electrical probing

Michal Stanislaw Smreczak

Monolithic integrated circuits (ICs) have been miniaturized over the past five decades, and today their components range in size from hundreds of microns to several nanometers. Making point contact with electrical samples under a microscope is referred to ...
EPFL2022

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