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Concept
Scanning thermal microscopy
Summary
Scanning thermal microscopy (SThM) is a type of scanning probe microscopy that maps the local temperature and thermal conductivity of an interface. The probe in a scanning thermal microscope is sensitive to local temperatures – providing a nano-scale thermometer. Thermal measurements at the nanometer scale are of both scientific and industrial interest. The technique was invented by Clayton C. Williams and H. Kumar Wickramasinghe in 1986.
Applications
SThM allows thermal measurements at the nano-scale. These measurements can include: temperature, thermal properties of materials, thermal conductivity, heat capacity, glass transition temperature, latent heat, enthalpy, etc. The applications include:
*Ultra large-scale integration (ULSI) lithography research and cellular diagnostics in biochemistry.
*Detecting such parameters as phase changes in polymer blends.
*Joule heating
*Measuring material variations in semiconductor devices
*Subsurface imaging
Official source
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