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In this master thesis, the use of MEMS technology to miniaturize existing accelerometers used for vibration sensing is demonstrated. An updated process flow was established and carried out in the cleanrooms. MEMS piezoelectric accelerometers were fabricate ...
Optical nanocavities enhance light-matter interaction due to their high quality factors (Q) and small modal volumes (V). The control of light-matter interaction lies at the heart of potential applications for integrated optical circuits, including optical ...
This project presents a microfabrication method for new generation particle detectors. This microsystem is supposed to detect ionizing radiation such as alpha particles, beta particles, and gamma rays. This project aims to miniaturized the otherwise well k ...
The understanding and manipulation of nanoscale analytes is a central theme in nanotechnology and has been one of the main driving forces behind the development of this field as we know it today. Furthermore, such a technology has the potential to also rev ...
Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of MEMS components. Most microfabrication techniques evolved from the microelectroni ...
This paper presents the design and implementation of a foil gas preconcentrator (FGP) on polyimide (PI) substrate. One novelty of the paper is that our device is made on flexible foil by using printing whereas all preconcentrators seen in literature are ma ...
Diffractive optical elements (DOEs) consist of surface reliefs with dimensions in the micrometer range and nanometer precision. Two technologies dominate: Elements replicated in plastic and directly microfabricated elements in fused silica. Plastic DOEs ar ...
Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of microelectromechanical system (MEMS) components. Most microfabrication techniques ...
The DNA Curtains assay is a recently developed experimental platform for protein-DNA interaction studies at the single-molecule level that is based on anchoring and alignment of DNA fragments. The DNA Curtains so far have been made by using chromium barrie ...
We present the fabrication of a microlens array which can be integrated into a microfluidic device. In the demonstrated technique, a microwell array is firstly fabricated in a Parylene-C layer by a standard cleanroom process. Afterwards, the optically tran ...
