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This paper presents a monolithic approach for the integration of silicon nanowires (Si NWs) with microelectromechanical systems (MEMS). The process is demonstrated for the case of co-fabrication of Si NWs with a 10-μm-thick MEMS on the same silicon-on-insu ...
With a view toward laser isotope separation of Si, we have studied infrared multiphoton dissociation (IRMPD) of room temperature trichlorosilane, SiHCl3. Over the wavelength range investigated, multiphoton dissociation of the room temperature species exhib ...
Self-assembled monolayer (SAM) films have attracted immense attention for both fundamental and applied research. A SAM is composed of a large number of molecules with a head group that chemisorbs onto a substrate, a tail group that interacts with the outer ...
Silicon and silicon nitride surfaces have been successfully terminated with carboxylic acid monolayers and investigated by atomic force microscopy (AFM) and scanning near-field optical microscopy (SNOM). On clean Si surface, AFM showed topographical variat ...
Recent developments and advances in micro-electro-mechanical systems for nanometer-scale applications such as scanning force microscopy are presented. The microfabrication of tools so small that they enable access to the nanoworid, such as tips, flexible c ...
A relation for an adequate pore fraction needed to obtain residual Si and C free composites via reactive Si-X alloy infiltration is presented. The volume ratio of SiC and carbonaceous phase, the composition of the infiltrating liquid and the apparent densi ...
We present in this work the fabrication of high aspect ratio nanopores in 500 nm PECVD SiC films through AAO (anodic aluminum oxide) mask. The initial AAO thin film is 180 nm thick and the diameter of nanopores is 33 ± 7 nm. We have used three plasma chemi ...
