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Using surface micromachining technology, we fabricated nanofluidic devices with channels down to 10̂nm deep, 200̂nm wide and up to 8̂cm long. We demonstrated that different materials, such as silicon nitride, polysilicon and silicon dioxide, combined with ...
The occurrence of an ultrathin SiO2 oxide layer at the interface between silicon and high-k dielectrics in metal-oxide-semiconductor devices contributes to degrading the capacitance of the gate stack. In this work, we investigate the dielectric and infrare ...
Using petrol as a main source of energy, during the 20th century, has caused considerable amounts of damage among which are atmospheric pollution and global warming. At the same time, many geologists and economists expect that the discovery rate of new pet ...
We present a MEMS process for the fabrication of arbitrary (adaptable to specific aperture geometries) stabilization of silicon nitride membranes to be used as miniature shadow masks or (nano) stencils. Stabilization was realized by the fabrication of sili ...
A light-emitting device comprising a substrate-supported Group III nitride semiconductor region having a p-n junction region for injecting carriers into an optically active region, wherein the p-n junction region comprises an aluminum indium gallium nitrid ...
The efficiency of Co(II)-, Mn(II)-, and Ti(IV)-doped carbon aerogels for the transformation of ozone into center dot OH radicals was investigated. The carbon aerogels had a markedly acid surface character (pH(PZC)congruent to 3-4) with very high surface ox ...
Atomic Force Microscope is of special interest to biologists since it enables real time imaging and force measurements on biological tissue. To observe the biological process of interest in a reasonable time with high force sensitivity, high resonance freq ...
We present the fabrication and characterization of hybrid SPM probes with full platinum (Pt) cantilever and tip for biological SPM experiments. In recent years, SPM has shown its value in imaging and characterizing biological samples. Classic SPM sensors f ...
Bimetallic Pt/Sn nanoparticles, synthesized by the microemulsion method, have been investigated once deposited on a boron-doped diamond (BDD) substrate electrode. Nanoparticles are in the nano-size domain and their effective composition corresponds to thei ...
Large area plasma-enhanced chemical vapor deposition of thin films such as silicon nitride or amorphous silicon is widely used for thin film transistor fabrication in the flat panel display industry. A numerical three-dimensional model to calculate the dep ...