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Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Introduces manufacturing technologies, covers research examples, explores material selection using Ashby plots, and provides instructions for a reverse engineering project.
Explores the forces, tips, and probes used in Scanning Probe Microscopy, focusing on AFM principles, tip resolution limits, and cantilever probe fabrication.
