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Lecture
Microphones in Smartphones
Description
This lecture covers the design and fabrication of MEMS microphones, focusing on capacitive MEMS microphones used in smartphones. It explains the components of a MEMS microphone, the role of the back-chamber in acoustic performance, and the fabrication process involving surface and bulk micromachining. The application of MEMS microphones in smartphones, including voice pick-up and noise cancellation functions, is also discussed.
Official source
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