Concept

Micromachinery

Related publications (32)

Fabrication of zipping electrostatic actuators incorporating inkjet-printed layers

Herbert Shea, Samuel Rosset, Giulio Grasso

Zipping electrostatic actuators operate by bending flexible electrodes using electrostatic forces. This principle allows the use of a wide range of dielectric and conductive materials. Additive Manufacturing (AM) techniques can be used to fabricate these a ...

SPIE-INT SOC OPTICAL ENGINEERING2021

Top-Down Fabrication of Gate-All-Around Vertically-Stacked Silicon Nanowire FETs with Controllable Polarity

Giovanni De Micheli, Davide Sacchetto, Yusuf Leblebici, Pierre-Emmanuel Julien Marc Gaillardon, Jian Zhang, Michele De Marchi

Asthe currentMOSFET scaling trend is facing strong limitations, technologies exploiting novel degrees of freedom at physical and architecture level are promising candidates to enable the continuation of Moore's predictions. In this paper, we report on the ...

Institute of Electrical and Electronics Engineers2014

3D Integration Technology for Lab-on-a-Chip Applications

Yüksel Temiz

This study adds a new dimension to lab-on-a-chip systems by employing three-dimensional (3D) integration technology for improved performance, higher functionality, and on-chip computational power. Despite the extensive amount of current research on 3D memo ...

EPFL2012

Sharp High-Aspect-Ratio AFM Tips Fabricated by a Combination of Deep Reactive Ion Etching and Focused Ion Beam Techniques

Luis Guillermo Villanueva Torrijo

The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 or nanoscaled structures, standard silicon atomic forc ...

2010

Micromachined tunable devices based on silicon integrated BaxSr1-xTiO3 thin films

Andreas Nöth

Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...

EPFL2009

Microwave periodic structures based on MicroElectroMechanical Systems (MEMS) and micromachining techniques

Julien Perruisseau-Carrier

As a result of the ever growing number of functionalities and standards to be supported by communication systems, as well as the constant development of radar and imaging technologies, a key research area in the field of microwaves and millimeter waves is ...

EPFL2007

Microfabricated electrically conducting and wear-resistant nanoprobes for scanning probe applications

Johannes Steen

The era of scanning probe microscopy (SPM) started twenty years ago. A cut gold cantilever with a glued diamond stylus served as the scanning probe. Within a few years the crystalline silicon (Si) became the – up to today – predominant SPM probe material. ...

EPFL2007

Novel full platinum nanoprobes suitable for biological SPM experiments

Jürgen Brugger, Johannes Steen

We have developed a hybrid scanning probe microscopy sensor consisting of a SU-8 body and full platinum cantilever and tip. The fabrication process is based on surface-micromachining of a silicon wafer, where oxidation sharpened moulds define the tip shape ...

2006

Surface micromachining of Ceramic-MEMS based on SU-8 micromoulding of Polyureasilazane

Jürgen Brugger, Vahid Fakhfouri

Chemical inertness and corrosion resistance make ceramic materials appropriate for Micro Electro-Mechanical Systems (MEMS) when aiming for sensing applications at high temperature or in harsh environment. Besides the usual fabrication techniques, such as p ...

2006

Surface Micromachining of Polyureasilazane Based Ceramic-MEMS using SU-8 Micromolds

Jürgen Brugger, Vahid Fakhfouri, Sébastien Jiguet

We describe a novel surface micromachining process for the fabrication of ceramic-type MEMS devices, such as free-standing cantilevers, that is based on the use of high-aspect ratio micromolds of SU8 and aluminum as sacrificial layer. 250μm-high and 100-10 ...

2006

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