Concept

Co-fired ceramic

Related publications (62)

Integrated LTCC pressure / flow / temperature multisensor for compressed air diagnostics

Peter Ryser, Thomas Maeder, Yannick Sébastien Fournier, Nicolas Craquelin, Grégoire Boutinard Rouelle

We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LT ...

2010

Portable LTCC gas viscometer for determining Wobbe number

Peter Ryser, Thomas Maeder, Conor Joseph Slater

This work presents the continued development of an autonomous portable system for measuring the Wobbe number (calorific content) of gases for the purpose of determining the quality of natural gas. Past research has shown the Wobbe number can be determined ...

Elsevier Science, Reg Sales Off, Customer Support Dept, 655 Ave Of The Americas, New York, Ny 10010 Usa2010

SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Peter Ryser, Thomas Maeder, Yannick Sébastien Fournier, Nicolas Craquelin, Grégoire Boutinard Rouelle

We have designed and fabricated a low-range (ca. 100 mN) thick-film piezoresistive force sensor with a cantilever beam fabricated in LTCC (Low Temperature Co-fired Ceramic). The beam was soldered onto a standard thick-film 25.4 x 12.7 mm signal conditionin ...

Elsevier2009

SMD pressure and flow sensor for compressed air in LTCC technology with integrated electronics

Peter Ryser, Thomas Maeder, Nicolas Craquelin

We propose an SMD (surface mount device) sensor in LTCC (low-temperature co-fired ceramic) technology specially designed for standard industrial compressed air. It combines the measurement of pressure, flow, and temperature, with its integrated signal cond ...

Elsevier2009

Monolithic integration in Fused Silica: When Fluidics, Mechanics and Optics meet in a single substrate

Yves Bellouard

We show that locally altering fused silica with femtosecond laser irradiation forms the basis for a novel manufacturing technology platform to produce highly integrated microsystems. In contrast to many common approaches that rely on combining materials to ...

2009

Micromachined electrospray thrusters for spacecraft propulsion

Renato Krpoun

Micromachining has enabled the downscaling of large, massive and power hungry systems into small batch-produced integrated devices. Recent progress in electrospray thruster technology, in particular the discovery of an ionic emission mode using the ionic l ...

EPFL2009

Evaluation of building technology for mass producible millimetre-sized robots using flexible printed circuit boards

Initial tests of a building technology for a compact three-dimensional mass producible microrobot are presented. The 3.9 × 3.9 × 3.3 mm3 sized prototype robot represents a microsystem with actuators, sensors, energy management and integrated electronics. T ...

2009

LTCC active oxygen getter module for hermetic packaging applications

Peter Ryser, Thomas Maeder, Yannick Sébastien Fournier, Frank Seigneur, Timothée Haller

LTCC and thick-film technologies constitute excellent platforms for hermetic and controlled-atmosphere packaging, for applications in MEMS, space, micro/nanofabrication and biological fields. This work presents an active oxygen getter module, based on an i ...

IMAPS2008

Monolithic MEMS-based reflectarray cell digitally reconfigurable over a 360° phase range

Anja Skrivervik, Julien Perruisseau-Carrier

In this letter, we present a reconfigurable reflectarray cell operating at 12 GHz and fabricated in a monolithic MEMS process. A 5-bit digital control allows reconfiguration of the reflection phase over the full 360deg range, while alleviating the impact o ...

Institute of Electrical and Electronics Engineers2008

MEMS inductors: Technology and applications

Martinus Gijs

We expose the past and present state-of-the-art of Micro-ElectroMechanical System (MEMS) inductors. Starting from the basic inductor equations, we discuss the various material and frequency-dependent loss mechanisms that contribute to a decreasing quality ...

Springer, 101 Philip Drive, Norwell, Ma 02061 Usa2008

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