Concept

Electrical impedance

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Paul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award. Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/)

Nikolaos Stergiopoulos

Education MTE, Managing the Technology Enterprise Program (2000), IMD, Lausanne Ph.D. in Biomedical Engineering & Engineering Mechanics (1990) Iowa State University, Ames, Iowa. MS in Biomedical Engineering (1987) Iowa State University, Ames, Iowa. Diploma in Mechanical Engineering (1985) National Technical University of Athens. Professional Activities 2002 - present: Professor and director of LHTC 2010 - present: Founder and director of Rheon Medical SA, Préverenges, Switzerland 2008 - present: Founder and director of Antlia S.A., PSE-C, EPFL campus, Switzerland 1998 - 2007: Founder and Scientific Director of EndoArt S.A., Lausanne, Switzerland 1996 - 2002: Assistant professor at the Biomedical Engineering Laboratory, Swiss Federal Institute of Technology, Lausanne, Switzerland. 1991 - 1996: Research Associate at Swiss Federal Institute of Technology - Lausanne 1990 - 1991: Lecturer, Iowa State University

Niccolo Piacentini

Philippe Flückiger

Since 1999 Philippe Flückiger is the Director of Operations at the EPFL Center of MicroNanoTechnology, a world-class state-of-the-art cleanroom dedicated to research and development in the field of Micro and NanoFabrication. He received his diploma in physics from the University of Neuchâtel, Switzerland in 1987 and his PhD from the same University in 1993. His thesis work was dedicated to the deposition, patterning and characterization of high temperature superconductor epitaxial thin films. From 1993 to 1994 he was a post doc at Stanford University to develop submicron lithography with the atomic force microscope in the group of Calvin Quate, inventor of the AFM. From 1995 to 1997 he was successively process engineer, project manager and process engineering manager at Micronas SA in Bevaix, Switzerland, a microelectronics company producing baseband processors and voltage regulators for wireless applications, mostly ASICs for Nokia Mobile Phones. In 1997 he spent 4 months in the production line of EM Microelectronic Marin SA, Switzerland, a semiconductor manufacturer specialized in the design and production of ultra low power, low voltage integrated circuits for battery-operated and field-powered applications. He joined then the Swiss Federal Institute of Technology in Lausanne (EPFL) to start the new activity in diffusion, oxidation and CVD at the Center of MicroNanoTechnology. He was appointed Director of Operations of the Center in 1999.

Samuel Terrettaz

Mustafa Suphi Erden

Marko Petkovic