Concept

Etching

Related publications (41)

Micromachining of Hafnium Carbide

During this project, the microfabrication of Hafnium Carbide (HfC) was investigated. Multiple tools were considered and tested for their compatibility and effectiveness when working with HfC. The main method of choice for the machining of HfC thin films wa ...

2023

Demonstrating and Unraveling a Controlled Nanometer-Scale Expansion of the Vacancy Defects in Graphene by CO2

Kumar Varoon Agrawal, Kuang-Jung Hsu, Luis Francisco Villalobos Vazquez de la Parra

A controlled manipulation of graphene edges and vacancies is desired for molecular separation, sensing and electronics applications. Unfortunately, available etching methods always lead to vacancy nucleation making it challenging to control etching. Herein ...

WILEY-V C H VERLAG GMBH2022

Study of Linear Coupling in NEMS

Maxime Pitteloud

Cantilever beams are used as mass sensing device of chemical analyte by measuring the shift in frequency. However there resolution is linked to their size. As it become increasingly hard to produce smaller device an alternative is to use mode localisation ...

2021

PDC microfabrication through KOH-etched Si mould casting

The purpose of this project is to fabricate a mould etched by KOH for PDC casting and produce the fist PDC using this method. Casting for PDC is a known process, it has been done with PDMS moulds created from Si masters. Si moulds have also been fabricated ...

2021

Study on the Performances of AlScN based SAW/BAW Hybrid Resonators A Parametric Analysis of Acoustic Wave Resonators with Large Figure of Merit

Luis Guillermo Villanueva Torrijo, Soumya Yandrapalli, Guilain Lionel Germain Lang

In this study, we analyze a 3rd type of FBAR's fundamental mode by finite element method. We show the importance of the substrate's wave velocity and conductivity on the electromechanical coupling efficiency. Then we demonstrate that etching traditional SA ...

IEEE2021

Microfluidics by Additive Manufacturing for Wearable Biosensors: A Review

Christian Enz, Sandro Carrara, Mahshid Alsadat Padash

Wearable devices are nowadays at the edge-front in both academic research as well as in industry, and several wearable devices have been already introduced in the market. One of the most recent advancements in wearable technologies for biosensing is in the ...

2020

Crystallization of gas-selective nanoporous graphene by competitive etching and growth: a modeling study

Kumar Varoon Agrawal, Soumajit Dutta

A robust synthesis methodology for crystallizing nanoporous single-layer graphene hosting a high density of size-selective nanopores is urgently needed to realize the true potential of two-dimensional membranes for gas separation. Currently, there are no c ...

2019

Ultrahigh flux gas-selective nanoporous carbon membrane and manufacturing method thereof

Kumar Varoon Agrawal, Nikunj Dudani, Mostapha Dakhchoune, Shiqi Huang, Guangwei He

The present relates to a nanoporous carbon membrane manufacturing method comprising coating a block copolymer film with hydrophilic and hydrophobic blocks, on a sacrificial non-porous substrate so as to prepare an block copolymer film coated foil, transfer ...

2018

Edge-contacted graphene with slope engineering by stencil lithography

Farzad Rezaeianaran

One approach to overcome the high contact resistance between 3D metals and 2D materials/heterostructures is employing edge contacts [1]. A low-resistance edge contact on boron nitride/graphene/boron nitride heterostructure using photolithography has been d ...

2018

High-aspect ratio nanopatterning via combined thermal scanning probe lithography and dry etching

Jürgen Brugger, Yuliya Lisunova

Thermal scanning probe lithography is an emerging nanofabrication technique for rapid prototyping of arbitrary topographies in thermally sensitive resist. This feature, paired to the recent advances in dry plasma etching techniques, allows the fabrication ...

Elsevier2017

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