Publication

Micromachining of Hafnium Carbide

Fabian Linus Bauer
2023
Student project
Abstract

During this project, the microfabrication of Hafnium Carbide (HfC) was investigated. Multiple tools were considered and tested for their compatibility and effectiveness when working with HfC. The main method of choice for the machining of HfC thin films was Ion Beam Etching (IBE). In the first step, the etch rate and selectivity were determined using three different methods. Then IBE was used successfully together with a standard photolithography process to create a pattern etched through the HfC film. The dependence of the etch recipe on the etch rate and sidewall verticality was then explored. Additionally, a second process using a Silicon Oxide (SiO) hard mask was tested to improve the results with regard to sidewall verticality and fencing. It was found to lead to a slight improvement. Two methods of releasing Micro-Electro-Mechanical-Systems (MEMS) devices were also investigated. For the release from a Si substrate Xenon difluoride (XeF2) was tested and judged a suitable means. For the release of devices from a SiO release layer vapour HF was tested but found not to be compatible with HfC and leading to undesirable reactions on the surface. Ellipsometry was checked as a method of determining the thickness of the HfC film but was found to be unsuitable due to material being too absorptive.

About this result
This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.