Parylene

Summary

Parylene is the common name of a polymer whose backbone consists of para-benzenediyl rings –C6H4– connected by 1,2-ethanediyl bridges –CH2–CH2–. It can be obtained by polymerization of para-xylylene H2C=C6H4=CH2. The name is also used for several polymers with the same backbone, where some hydrogen atoms are replaced by other functional groups. Some of these variants are designated in commerce by letter-number codes such as "parylene C" and "parylene AF-4". Some of these names are registered trademarks in some countries. Coatings of parylene are often applied to electronic circuits and other equipment as electrical insulation, moisture barriers, or protection against corrosion and chemical attack (conformal coating). They are also used to reduce friction, and in medicine to prevent adverse reactions to implanted devices. These coatings are typically applied by chemical vapor deposition in an atmosphere of the monomer para-xylylene. Parylene is considered a "green" polymer

Official source

https://en.wikipedia.org/wiki/Parylene

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Solid-On-Liquid Technology for Suspended Microchannel Fabrication

Antoine Nicolas Désiré Aupée, Annalisa De Pastina

In this project a new fabrication strategy for suspended microchannel resonators (SMRs) is described. SMRs are biosensing devices with the liquid flowing inside of them, allowing real time measurements of fluidic samples, while devices can be kept in dry environment. This project will investigate the use of Parylene C and Solid on Liquid Technology to facilitate SMRs fabrication process. More precisely, this report will cover two different processes. The first one based on a chemical trapping solution involving the use of a hydrophobic surface treatment. The second one based on the use of photoresist as a sacrificial material to define parylene microfluidic channel resonators. The results described in this project seeks to help the development of future processes in order to reduce the time and complications normally involved in the fabrication of SMRs.

2015

Parylene-Based Hollow Nanomechanical Resonators For Bioapplications

Antoine Nicolas Désiré Aupée, Annalisa De Pastina, Tom Larsen, Luis Guillermo Villanueva Torrijo

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in micro- and nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have also demonstrated compatibility with metallic electrodes and aluminum nitride piezoelectric layers.

2016

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Parylenes are used for a wide range of applications in microelectromechanical systems (MEMS) devices. However, their poor adhesion in a harsh liquid environment can limit the fabrication processes of complex MEMS and bioMEMS devices. Potassium hydroxide (KOH) wet etching is particularly challenging and was used to evaluate the adhesion of Parylene C on silicon, silicon nitride, and silicon dioxide substrates. Using a number of characterization procedures, this paper shows that the delamination is the result of liquid penetrating both at the Parylene-substrate interface and through the polymer layer. The combination of an adhesion promoter and a thermal treatment improves the adhesion of the layer. The treatment is evaluated in two case studies, where the Parylene is used as: 1) a biocompatible coating, and 2) as a mask to block the entrance of a microfluidics channel. In the first case, it is shown that the treatments, including the KOH exposure, do not influence the growth and proliferation of SaOS-2 cells, as compared to a generic Parylene layer. In the second case, the results show that Parylene can be used efficiently to block the entrance of the channel, and that it can be removed afterward.

Ieee-Inst Electrical Electronics Engineers Inc2013