Related publications (18)

Addressable Acoustic Actuation of 3D Printed Soft Robotic Microsystems

Mahmut Selman Sakar, Murat Kaynak, Pietro Luciano Jakobus Dirix

A design, manufacturing, and control methodology is presented for the transduction of ultrasound into frequency-selective actuation of multibody hydrogel mechanical systems. The modular design of compliant mechanisms is compatible with direct laser writing ...
2020

Fast turnaround fabrication of silicon point-contact quantum-dot transistors using combined thermal scanning probe lithography and laser writing

Matthieu Jean Michel Rüegg, Cheng Wang, Nolan Lassaline

The fabrication of high-performance solid-state silicon quantum-devices requires high resolution patterning with minimal substrate damage. We have fabricated room temperature (RT) single-electron transistors (SETs) based on point-contact tunnel junctions u ...
2018

3D Structuration Techniques of LTCC for Microsystems Applications

Yannick Sébastien Fournier

This thesis aimed at developing new 3D structuration techniques for a relatively recent new ceramic technology called LTCC, which stands for Low Temperature, Co-fired Ceramic. It is a material originally developed for the microelectronic packaging industry ...
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