Concept

Photomask

Related publications (98)

Woven Temperature and Humidity Sensors on Flexible Plastic Substrates for E-Textile Applications

Nico de Rooij, Danick Briand, Caglar Ataman, Jinyu Jason Ruan, Francisco Molina Lopez, Andres Felipe Vasquez Quintero, Giorgio Mattana, Giovanni Nisato, David Leuenberger

In this paper, a woven textile containing temperature and humidity sensors realized on flexible, plastic stripes is presented. The authors introduce two different sensors fabrication techniques: the first one consists of a conventional photolithography pat ...

Ieee-Inst Electrical Electronics Engineers Inc2013

Method and system for computing Fourier series coefficients for mask layouts using FFT

Paul Hurley, Robin Scheibler, Krzysztof Kryszczuk

A method and system for computing Fourier coefficients for a Fourier representation of a mask transmission function for a lithography mask. The method includes: sampling a polygon of a mask pattern of the lithography mask to obtain an indicator function wh ...

United States Patent and Trademark Office2013

A CMOS Compatible Chip-to-Chip 3D Integration Platform

Carlotta Guiducci, Michail Zervas, Yusuf Leblebici, Yüksel Temiz

In this paper, a CMOS-compatible chip-to-chip 3D integration platform will be presented. The developed technology allows reconstituting a wafer from diced and thinned chips. Then, chip-to-chip bonding and TSV fabrication steps are accomplished in wafer-lev ...

IEEE2012

Méthode de décapage sélective d'un matériau sur un substrate en quartz par l'utilisation d'un faisceau -induit

Patrik Willi Hoffmann, Michel Rossi, Tristan Bret, Xavier Multone

A method and apparatus for local beam processing using a beam activated gas to etch material are described. Compounds are disclosed that are suitable for beam-induced etching. The invention is particularly suitable for electron beam induced etching of chro ...

2012

Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Robert Andrew Lockhart

This paper presents a complete wafer level microfabrication process for the production of unimorph MEMS energy harvesters based on bulk PZT. Recently, piezoelectric harvesters designed to take advantage of the high quality piezoelectric properties of bulk ...

Elsevier Science Bv2012

Directly fabricated multi-scale microlens arrays on a hydrophobic flat surface by a simple ink-jet printing technique

Jürgen Brugger, Joo Yeon Kim

A shape-tunable approach is demonstrated for the fabrication of multi-scale polymer microlenses ([small mu ]-lenses) and microlens arrays (MLAs) using an ink-jet printing (IJP) technique. Also, the influence of the surface wetting conditions on the geometr ...

Royal Society of Chemistry2012

Photopatterning the mechanical properties of polydimethylsiloxane films

Stéphanie Lacour

Silicone rubber films with graded and localized mechanical properties are prepared using two-part polydimethylsiloxane (PDMS) elastomer, photoinhibitor compounds and conventional photolithography. First the un-cross-linked PDMS is mixed with benzophenone. ...

American Institute of Physics2011

Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA

Nico de Rooij, Sebastian Gautsch

We present results on various post processing techniques to create complex 3-dimensional nanostructures with enhanced capabilities. The starting point for all architectures is a self aligned nanopillar with surrounding circular rim in PMMA. This particular ...

Elsevier2011

Angular Dependence of Magnetic Normal Modes in NiFe Antidot Lattices With Different Lattice Symmetry

Dirk Grundler

We report an experimental investigation of the magnetic normal modes in large-area Ni80Fe20 antidot arrays fabricated on commercially available silicon substrates using deep ultraviolet lithography at 248 nm exposing wavelength. The effect of the lattice s ...

Institute of Electrical and Electronics Engineers2010

Fabrication of Heterogeneous Nanogaps for Characterizing Electrochemical Metal Deposition Processes

Nico de Rooij, Sebastian Gautsch, Yexian Wu

We present a much simpler and high-throughput method compared to mechanically break junctions (MBJ) and electro-migration, to produce a heterogeneous nanogap, directly using electron beam lithography and metal lift-off technology. Au – Pt and Au – Pt silic ...

2010

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