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Plasma-enhanced chemical vapor deposition
Applied sciences
Chemical engineering
Materials science
Thin film
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Chemical Vapour Deposition: Thin Films & Oxidation
Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.
CVD: Theoretical Concepts and Boundary Layers
Explores theoretical concepts in CVD, focusing on boundary layers and the Reynolds number.
