CVD: Theoretical Concepts and Boundary Layers

This lecture covers theoretical concepts in Chemical Vapor Deposition (CVD), focusing on the velocity boundary layer and concentration boundary layer near a heated substrate. It explains the role of the Reynolds number in mass transport, distinguishing between laminar and turbulent flow regimes. The physical interpretation of the Reynolds number is discussed, emphasizing the balance between inertia and viscous shear forces. The transition between laminar and turbulent flow is explored, with practical examples provided. In summary, the lecture delves into fundamental principles of CVD and boundary layer phenomena in micro and nanofabrication.