MICRO-331: Microfabrication technologiesThe student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexibl
MICRO-373: Advanced microfabrication practicalsThis TP allows for in-depth training on advanced micro and nanofabrication methods in a clean-room environment for selected applications, gain deeper knowledge in MEMS/NEMS processes, work in a small
MICRO-501: MEMS practicals IObjective of this practical is to apply in specific experimental settings the knowledge acquired in various MEMS related class
MICRO-621: MOOC: Micro and Nanofabrication (MEMS)Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC
MICRO-605: Optical MEMS and micro-opticsMicro-optics and optical MEMS encompass a wide range of methods, devices and systems that enable precise, high-speed manipulation of light at the wavelength scale. MICRO605 provides a comprehensive i
ME-426: Micro/Nanomechanical devicesIn this course we will see an overview of the
exciting field of Micro and Nanomechanical systems. We will go over the dfferent scaling laws that dominate the critical parameters, how size affects mat