Lecture

Nanoimprint Lithography: Emerging Nanopatterning Methods

In course

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Description

This lecture covers the basics of lithography, including deep ultraviolet lithography and focused electron beam lithography. It also delves into emerging nanopatterning methods such as nanoimprint lithography, soft-lithography, and nanostencil lithography. The instructor discusses the nanoimprint process model, issues with thermal nanoimprint lithography, and provides examples of nanoimprint lithography applications in mass production and high-end microelectronic chips.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_0oqbrl9m

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Ontological neighbourhood

Chemical engineering

Nanotechnology: Topics in nanotechnology

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