Lecture

Nanoimprint Lithography: Basics and Applications

In course

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Description

This lecture covers the basics of nanoimprint lithography (NIL) as a nanopatterning method, including imprint stack preparation, emerging replication methods, process models, issues with thermal NIL, and examples of NIL applications in mass production and high-end microelectronic chips.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_k4ol1oyd

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Ontological neighbourhood

Chemical engineering

Nanotechnology: Topics in nanotechnology

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