Analytical Electron Microscopy: Spectroscopy and Microanalysis
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Covers X-Ray Photoelectron Spectrometry (XPS), a surface analysis technique developed by Kai Siegbahn, explaining its components, mechanism, and analysis methods.
Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
Explores applications of micron and submicron focusing, crystallography, and tomographic reconstructions in beamlines, as well as the need for secondary optics and different types of lenses.
Explores Energy-Dispersive X-ray Spectroscopy (EDS) in electron microscopy, covering x-ray generation, detection, quantification, and mapping of elements in samples.
