Lecture

Inspection and Metrology: Electron Microscopy

In course

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Description

This lecture covers the principles and applications of scanning electron microscopy (SEM) in micro and nanofabrication. It explains why electrons are used instead of photons, the components of an SEM system, and the different electron signals used for inspection. The lecture also discusses the challenges of charging in SEM, XY lateral dimension measurement, and the advantages and limitations of SEM in inspecting soft samples.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_u3jpq0s8

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