Lectures related to Advanced MEMS and Microsystems: Interactive Session Instructions

Optical MEMS Basics and Applications

Explores Optical MEMS basics, actuation mechanisms, applications, market overview, key metrics in fiber-optic devices, and tunable lasers.

Nanoscale MEMS or NEMS

Covers the transition to nanoscale devices, nanoscale imaging, capillary forces, AFM of graphene, and integrated sensors & actuators.

Stress in Thin Films: Film Growth and Microfabrication

Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.

Parallel Robotics: Kinematics and Applications

Covers the history, kinematics, and applications of parallel robots with closed kinematic chains and all motors at the base, including the Delta robot and its variants.