Stress in Thin Films: Film Growth and Microfabrication

This lecture covers the stress in thin films, including extrinsic and intrinsic stresses, uniform stress distribution, and stress gradients. It also discusses factors like expansion coefficients, Young's modulus, Poisson ratio, and thermal expansion. The lecture further explores lattice mismatch, voids, foreign atoms, and the impact of bombardment during deposition on stress levels. Additionally, it delves into the Stoney equation, concave and convex shapes, and their effects on film stress. The presentation concludes with a summary of film growth, focusing on atoms arrival, film-substrate interface, adhesion, growth modes, crystal structure, and stresses in thin films, all within the context of micro and nanofabrication (MEMS).