Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.
