Lecture

Cleanroom Basics: Introduction to Contamination Issues

In course

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Description

This lecture covers the basics of cleanrooms and the issue of contamination in microfabrication processes. It discusses the impact of contaminants like microparticles, metallic ions, and unwanted chemicals on device performance and reliability. The sources of contamination, including air, process water, process chemicals, and gases, are explored in detail, emphasizing the importance of maintaining a clean environment to ensure the quality and reliability of microfabricated devices.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_5jf067mg

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Ontological neighbourhood

Environmental science

Pollution: Water pollution

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