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Lecture
Are you an EPFL student looking for a semester project?
Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
This lecture covers the general concepts of lithography, including resist coating, surface cleaning, resist adhesion, and exposure methods such as optical lithography, electron beam lithography, X-ray lithography, and ion beam lithography. It also discusses resist properties like resist thickness, resist tones, contrast, and pattern transfer techniques.