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Lecture
Thin Films: Growth and Interfaces
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Deposition: Physical Vapor Deposition (PVD) Techniques
Explores Physical Vapor Deposition (PVD) techniques for thin film deposition in nanofabrication, addressing issues like metal diffusion and proper metal contact.
Thin-Film Processing: Removal and Deposition
Explores thin-film removal and deposition techniques in CMOS technology, covering wet etching, dry etching, chemical mechanical polishing, and thin-film deposition methods.
Electron Diffraction: Basics & Applications
Explores electron diffraction fundamentals, crystal symmetry, and advanced techniques for materials analysis.
Thin-Film Processing: Plasma Deposition
Explores plasma-enhanced chemical vapor deposition for thin-film processing and its impact on film properties and material quality.
Thin Films: Deposition and Patterning
Explores thin film preparation, growth mechanisms, and patterning techniques for organic electronic devices.
2D Materials Synthesis and Properties
Covers the synthesis methods and properties of 2D Transition Metal Dichalcogenides, exploring doping, epitaxy, and heterostructures.
Chemical Vapour Deposition Basics
Introduces the basics of Chemical Vapour Deposition, covering gas flow, pressure, and film growth kinetics.
Fabrication extended: Deposition
Explores the process of deposition, thermal oxidation, and chemical vapor deposition techniques.
Chemical Vapor Deposition: Oxide Formation and ALD
Explores CVD processes for oxide formation and ALD in micro and nanofabrication.
Stress in Thin Films: Film Growth and Microfabrication
Examines stress in thin films, including uniform distribution and intrinsic factors, within the context of microfabrication.