Lecture

Stencil Lithography: Nanometer Scale Patterning

In course

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Description

This lecture introduces stencil lithography as a one-step, resistless process for high-resolution direct patterning at the nanometer scale. It covers the advantages over conventional lithography, such as no contact, no photoresist, and no high-temperature processes. Examples include deposition of various metals and challenges like membrane stability and alignment.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_anuaj23r

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