Micro/Nanomechanical Devices: Fabrication Techniques

This lecture covers the fabrication of micro/nanomechanical devices, starting with the release of mechanical parts and the importance of selectivity and avoiding stiction. It explains the transition from micro to nano dimensions, detailing deposition methods, implantation, etching, lithography, and bottom-up growth techniques like CVD and VLS. The lecture emphasizes the critical role of annealing and the challenges in achieving uniformity and reproducibility in fabrication processes.