Covers X-Ray Micro-Analysis (XRMA) comparing techniques for analyzing matter with electron beams, discussing interaction volume, emission, fluorescence, and matrix effects.
Covers X-Ray Photoelectron Spectrometry (XPS), a surface analysis technique developed by Kai Siegbahn, explaining its components, mechanism, and analysis methods.
Covers Energy Dispersive X-ray Microanalysis, explaining how X-rays reveal elemental composition and discussing X-ray generation, detection, efficiency, and quantification.
Explores the principles and applications of scanning electron microscopy in micro and nanofabrication, covering electron signals, charging issues, and dimensional measurements.
