Lithography: Photoresist Sensitivity and Modulation Transfer Function

In course

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Description

This lecture covers the importance of photoresist properties in lithography resolution, focusing on intrinsic sensitivity and resist contrast. It also explains the optical transfer function and its role in defining the condition for the optical image.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_d1x64wf0

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Ontological neighbourhood

Electrical engineering

Electromechanics: Microelectromechanical systems

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