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Lecture
Are you an EPFL student looking for a semester project?
Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
This lecture introduces lithography by explaining general concepts and the fabrication of lithography masks using a direct write laser tool. It covers UV lithography, electron beam lithography, and emerging alternative lithographies, emphasizing the importance of transferring geometric shapes to radiation-sensitive material to define integrated circuit regions.