Lecture

Lithography: General Concepts and Mask Fabrication

In course

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Description

This lecture introduces lithography by explaining general concepts and the fabrication of lithography masks using a direct write laser tool. It covers UV lithography, electron beam lithography, and emerging alternative lithographies, emphasizing the importance of transferring geometric shapes to radiation-sensitive material to define integrated circuit regions.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_mp9auvms

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Ontological neighbourhood

Electrical engineering

Electromechanics: Microelectromechanical systems

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