Gas Transport and Film Growth Rate

This lecture covers the mass transport in the boundary layer, focusing on the advection and diffusion of gas molecules. It explains the net rates of gas entering the control volume due to advection and diffusion in the x-direction. The lecture also discusses species conservation requirements in a volume element and the mass transfer from the gas phase to the substrate. It delves into the expression for diffusion coefficient and the mass transfer coefficient, as well as the calculation of the film growth rate in different growth regimes. Experimental results on the deposition rate of silicon growth are presented, concluding with a summary on gas transport and chemical vapor deposition film growth rate equation.