Energy Dispersive X-ray Microanalysis

This lecture introduces Energy Dispersive X-ray Microanalysis (EDX), a technique for elemental analysis. It explores the generation of X-rays, detection methods, quantification, and examples of its application. EDX relies on the emission of characteristic X-rays from a specimen when stimulated by charged particles. The unique atomic structure of each element allows for the identification of X-rays emitted. The lecture covers the efficiency of X-ray generation, X-ray fluorescence yield, and Moseley's Law. It also delves into the challenges of detection limits, spatial resolution, and correction methods for accurate quantification.